BHANU PRAKASH SAH. Machine Learning–Based Predictive Maintenance for Semiconductor Fabrication Equipment: Failure Modes, Data Challenges, and Yield Impact. American Journal of Data Science and Analytics, [S. l.], v. 7, n. 10, p. 36–89, 2026. DOI: 10.63125/yybaz392. Disponível em: https://ajdsa-journal.org/index.php/ajdsa/article/view/118. Acesso em: 28 oct. 2026.